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TED (EU)
TENDER
Active
Sweden - Industrial machinery - Deep Reaction Ion Etcher (DRIE)
Published Today
3 Nov 2026
Deadline in 14 days
- Primary CPV
-
42000000 *
Industrial machinery
- Location
- 🇸🇪 Sweden
- Value
- No value specified
- Contract
- Not specified
- Contract Types
-
42 *Industrial machineryFull CPV Breakdown
- SME suitable
- Not stated
Publisher Address
Sweden · Sweden
Contact
Award Criteria
Not specified
- Bidding Documents (e-avrop.com) · Bidding Documents
Related tenders
Uppsala universitet
All notices from this publisher Same CPV code
42000000 *
All notices with this CPV code
Myfab Uppsala aims at purchasing a Deep Reaction Ion Etcher (DRIE). The purpose of the tool is to transfer patterns defined by e.g., photo- and electron beam lithography covering the pattens size range from all substrate range down to a few nanometres. The system will be used by many operators in a university laboratory environment. It must be easy to use and be insensitive to frequent change of process between batches. The processes include broad range of etching capability: low to high etch rate, wafer dicing, high uniformity, high open area, high aspect ratio, and nanometre scale. The system is intended for etching of silicon as well as other materials compatible with silicon etching, with both photoresist resins and hard masks for patterning.
Full CPV breakdown
- 42000000 — (primary)
Notice details
- Competition
- Open competition (any supplier can bid)
- Procurement method
- Open procedure
- Notice status
- Active
- Published
- 03 Nov 2026 00:00
- Deadline
- 17 Nov 2026 00:00
- OCID
- ted-763694-2026
Full notice record
14 detailsEverything the publisher included in this notice, organised by section. Contact details hidden: upgrade to Pro to see
Buyer
| Name | Uppsala universitet |
Organisations
| Name | Uppsala universitet |
| Role | buyer |
| Address › Country | Sweden |
| Address › Region (NUTS) | Sweden |
Tender
| Title | Sweden - Industrial machinery - Deep Reaction Ion Etcher (DRIE) |
| Status | active |
| Procedure type | open |
| Procedure | Open procedure |
| Bidding period › End | 2026-11-17 |
| Item › Delivery › Region (NUTS) | Sweden |
| Item › Delivery › Country | Sweden |
| Document › Document type | Bidding documents |
| Document › Link | https://www.e-avrop.com/uppsalauniv/e-Upphandling/NoticeLink.aspx?id=1... |